Electron beam generating apparatus and electron beam exposure apparatus
AssigneeAdvantest Corporation
InventorsYoshihisa Ooae, Yoichi Shimizu, Takamasa Satoh, Takeshi Haraguchi
Life of this patent
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Abstract
An electron beam generating apparatus for generating a plurality of electron beams, which includes: a plurality of cathodes for generating thermoelectrons; a cathode power supply unit for applying negative voltage to the cathodes so as to emit the thermoelectrons from the cathodes; a plurality of grids, which correspond to the plurality of cathodes respectively, for focusing the thermoelectrons emitted from each of the plurality of cathodes, and shaping the plurality of electron beams; and an insulator on which the plurality of cathodes and the plurality of grids are attached.
Claims19
An electron beam generating apparatus for generating a plurality of electron beams, comprising:
- a plurality of cathodes for generating thermoelectrons;
- a cathode power supply unit for applying negative voltage to said cathodes so as to emit the thermoelectrons from said cathodes;
- a plurality of grids, which correspond to said plurality of cathodes respectively, for focusing the thermoelectrons emitted from each of said plurality of cathodes, and shaping the plurality of electron beams;
- and
- an insulator on which said plurality of cathodes and said plurality of grids are attached.
An electron beam exposure apparatus for exposing a wafer by an electron beam, comprising:
- an electron beam generating apparatus for generating the electron beam;
- a deflector for deflecting the electron beam into a desired position on the wafer;
- and
- a stage for supporting the wafer, and wherein
- said electron beam generating apparatus comprises:
- a plurality of cathodes for generating thermoelectrons;
- a cathode power supply unit for applying negative voltage to said cathodes so as to emit the thermoelectrons from said cathodes;
- a plurality of grids, which correspond to said plurality of cathodes respectively, for focusing the thermoelectrons emitted from each of said plurality of cathodes, and shaping the plurality of electron beams;
- and
- an insulator on which said plurality of cathodes and said plurality of grids are attached.
Dependencies are inferred from the claim text.