Optical column for charged particle beam device
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorHans-Peter Feuerbaum
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Abstract
The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen (14). Thereby, the column comprises a charged particle source (2) for providing a beam of charged particles (10); a lens system for guiding the beam of charged particles (10) from the source (2) onto the specimen (14); and a housing (40) which, during operation, is set on beam boost potential.
Claims10
A miniaturized optical column for a charged particle beam apparatus for examining a specimen 14 comprising:
- a charged particle source 2 for providing a beam of charged particles 10;
- a lens system for guiding the beam of charged particles 10 from said source 2 onto said specimen 14;
- and
- a housing 40, whereby during operation said housing is set on beam boost potential.
The optical column of claim 2, whereby
- the housing comprises a valve arranged between said particle source and said objective lens,
- whereby during operation said valve is set on beam boost potential.
The optical column of any of the preceding claims, whereby
- the housing comprises a deflection unit for scanning the charged particle beam over the specimen,
- whereby during operation said deflection unit is set on beam boost potential.
The optical column of any of the preceding claims, whereby
- the housing comprises a detector for collecting particles or photons created by the charged particle beam impinging on the specimen,
- whereby during operation said detector is set on beam boost potential.
The optical column of any of the preceding claims, whereby
- the housing comprises further parts arranged in the vicinity of the charged particle beam,
- whereby during operation said parts are set on beam boost potential.
The optical column of any of the preceding claims, whereby
- the housing 40 is surrounded by a cover 42 which is set on ground potential
The optical column of any of the preceding claims, whereby only electrostatic components are used within the housing.
The optical column of any of the preceding claims, whereby permanent magnetic components are used within the housing.
The optical column of any of the preceding claims, whereby an electrode for decelerating the charged particles before they hit the specimen is arranged above the specimen.
Dependencies are inferred from the claim text.