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US 2003/0155520 A1Published application
Dimensionally stable ion optic component and method of manufacturing
AssigneeAgilent Technologies, Inc.
InventorJames E. Young
Life of this patent
Estimating the term…
Abstract
An ion optic device is dimensionally stable over variations in temperature when constructed with a ceramic or glass-ceramic substrate. A conductive or resistive coating is applied on surfaces of the substrate that are required to be particularly conductive or resistive for the function of the ion optic device.
Claims18
A method of fabricating an ion optic device comprising the steps of:
- shaping a ceramic material into at least a portion of the ion optic device;
- and
- covering at least a portion of the shaped ceramic material with at least one material selected from a group consisting of a conductive material and a resistive material.
An ion optic device for manipulating ions in a vacuum, comprising:
- a ceramic substrate having a cavity therein;
- and
- a conductive coating on at least a portion of an interior surface of the cavity, the conductive coating provided for receiving an applied voltage to act upon the ions.
Dependencies are inferred from the claim text.