Semiconductor device inspection system
AssigneeTokyo Electron Limited
InventorWataru Karasawa
Life of this patent
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Abstract
A device inspection apparatus inspects a plurality of semiconductor devices on an individual device basis. An inspection target sorting part (8) omits an execution of an inspection to be applied to the semiconductor devices according to information which specifies a defective device that has been determined to be defective in a manufacturing process that has been applied to the device.
Claims10
A device inspection apparatus for inspecting a plurality of devices on an individual device basis,
- characterized in that:
- an inspection target sorting part (8) omits an execution of an inspection to be applied to the devices according to information which specifies a defective device that has been determined to be defective in a manufacturing process that has been applied to the device.
A device manufacturing system comprising:
- a device manufacturing apparatus (1, 3, 5) which manufactures a plurality of devices and acquires information which specifies a device having a defective part;
- and
- a device inspection apparatus (7) which inspects the devices manufactured by said device manufacturing apparatus,
- characterized in that:
- said device inspection apparatus (7) includes an inspection target sorting part (8) which omits an execution of an inspection to be applied to the devices according to the information which specifies a device having a defective portion that has been formed during a manufacturing process performed by said device manufacturing apparatus.
A device manufacturing system comprising:
- a plurality of device manufacturing apparatuses (25);
- and
- an inspection apparatus (7) which inspects the devices manufactured by manufacturing processes performed by said device manufacturing apparatuses,
- characterized in that:
- an inspection part (6) performs an inspection to determine whether a defect occurs in the devices during the manufacturing processes of the devices after the devices are subjected to the manufacturing process by at least two of said device manufacturing apparatuses, and acquiring information specifying one of the devices determined to be defective;
- and
- said inspection apparatus (7) includes an inspection target sorting part (8) which omits an execution of an inspection to be applied to the devices according to the information which specifies a defective device that has been determined to be defective in the manufacturing processes of the device.
A device inspection method for inspecting a plurality of devices on an individual device basis,
- characterized by the steps of:
- preparing information which specifies a defective device determined to be defective in a manufacturing process of said devices;
- and
- omitting an execution of an inspection to be applied to one of said devices determined to be defective in accordance with the information prepared in the preparing step.
Dependencies are inferred from the claim text.