Method for forming a thin film
AssigneeTokyo Institute of Technology
InventorsMasahiro Yoshimura, Seung-Wan Song, Tomoaki Watanabe
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Abstract
A reactive solution with an amount of 250 mL is made of distilled water and LiOH.H2O (4M) melted in the distilled water. Then, the reactive solution is put in a flow-type reactor, and is flown in between an anode electrode and a cathode electrode set in the flow-type reactor at a given temperature and a given flow rate. Then, a given voltage is applied between the anode electrode and the cathode electrode with dropping an oxidizer of hydrogen peroxide (H2O2) into the reactive solution to form a lithium-cobalt oxide thin film on the anode electrode.
Claims10
A method for forming a thin film comprising the steps of:
- setting an anode electrode and a cathode electrode in a reactive solution,
- flowing the reactive solution in between the anode electrode and the cathode electrode at a given flow rate, and
- applying a given voltage between the anode electrode and the cathode electrode, thereby to synthesize a compound thin film including the components of the reactive solution and the anode electrode on the anode electrode.
A method for forming a thin film comprising the steps of:
- setting an anode electrode and a cathode electrode in a reactive solution,
- flowing the reactive solution in between the anode electrode and the cathode electrode at a given flow rate, and
- applying a given voltage between the anode electrode and the cathode electrode, thereby to synthesize a compound thin film including the components of the reactive solution and the anode electrode on a given substrate arranged in the flow direction of the reactive solution.
Dependencies are inferred from the claim text.