Electrochemical nanostructuring method and device
OwnerThomas Schimmel, Christian Obermair +2inventors
InventorsThomas Schimmel, Christian Obermair, Matthias Muller, Christian Klinke
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Abstract
The present invention relates to a method for producing surface-structured substrates, wherein a predetermined defined surface structuring is transferred to the surface of a substrate by activating the substrate surface using at least one fine probe that interacts with the substrate surface, and material of a liquid, solid, or molten salt electrolyte is electrochemically deposited in a selective manner on the regions of the substrate surface that are activated thereby. The invention also relates to a device for surface structuring of substrates.
Claims19
Method for producing surface-structured substrates, wherein a predetermined defined surface structuring is transferred to the surface of a substrate by activating the substrate surface using at least one fine probe that interacts with the substrate surface, and material of a liquid, solid, or molten salt electrolyte is electrochemically deposited in a selective manner on the regions of the substrate surface which are thus activated.
Device for surface structuring of substrates, comprising at least one fine probe which interacts with the substrate surface and which transfers a predetermined defined surface structuring to the surface of a substrate by activating the substrate surface, and
- at least one electrolyte supply which furnishes a liquid, solid, or molten salt electrolyte for the electrochemical deposition of material in a selective manner on the regions of the substrate surface activated by the probe,
- a device for computerized tracing of a preprogrammed contour line,
- and a device which simultaneously controls a superimposed periodic or nonperiodic lateral movement of the probe.
Dependencies are inferred from the claim text.