Method for the removing of adsorbed molecules from a chamber
AssigneeSteag RTP Systems, Inc.
InventorsZsolt Nenyei, Wilfried Lerch, Jurgen Niess, Thomas Graf
Life of this patent
Estimating the term…
Abstract
A method of removing first molecules adsorbed on the surfaces of a chamber and/or at least one object found in the chamber is provided. Second, polar molecules that have a desorptive effect on the first molecules are introduced into the chamber. The second molecules comprise nitrogen and hydrogen, and especially NH3 molecules.
Claims14
Method for the removal of first molecules adsorbed on the surfaced of a chamber and/or on at least one object located in the chamber, in particular a processing or transfer chamber of a rapid heating unit, characterized by introducing second polar molecules into the chamber that exert a desorptive effect upon the first molecules.
Method according to one of the preceding claims, characterized in that prior to, during and/or after the introduction of the second polar molecules, a rinsing gas, especially an inert gas or N2, is conveyed through the chamber.
Method according to one of the preceding claims, characterized in that first rinsing gas and subsequently a mixture of rinsing gas and the second polar molecules are conveyed through the chamber.
A method according to one of the preceding claims, characterized in that the temperature within the chamber is controlled.
Method according to one of the preceding claims, characterized in that the walls of the chamber and/or an object found in the chamber is heated.
Method according to one of the preceding claims, characterized in that the second polar molecules and/or rinsing gas is heated prior to the introduction into the chamber.
Method according to one of the preceding claims, characterized in that the second polar molecules are comprised of nitrogen and hydrogen, and in particular are NH3 molecules.
Method according to one of the preceding claims, characterized in that the second polar molecules comprise fluorine and/or chlorine.
Method according to one of the preceding claims, characterized in that the pressure in the chamber is controlled to an overpressure or an underpressure.
Dependencies are inferred from the claim text.