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AssigneeRobert Bosch GmbH
InventorsRainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfam Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements (100, 200) take place in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
Yaw-rate sensors having a first Coriolis element (100) and a second Coriolis element (200) which are arranged side-by-side above a surface of a substrate (1), excitation means (104, 105, 204, 205) being provided which are able to induce the Coriolis elements (100, 200) to oscillate parallel to a first axis (Y), detection means (101, 201) being provided which make it possible to verify a deflection of the Coriolis elements (100, 200) on the basis of a Coriolis force in a second axis (X) that is perpendicular to the first axis, the first and second axis (X, Y) being parallel to the surface of the substrate (1), wherein the oscillations of the first and second Coriolis elements (100, 200) take place in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
The yaw-rate sensor as recited in one of the foregoing claims, wherein provided for the first and second Coriolis elements (100, 200) is in each case a drive element (102, 202) that is connected to the respective Coriolis element (100, 200) by springs, the springs (103, 203) being designed to be stiff in the first axis Y and yielding in the second axis X.
The yaw-rate sensor as recited in one of the foregoing claims, wherein as detection means, movable electrodes (121) are connected to the Coriolis elements (100, 200), that are arranged opposite stationary electrodes (122, 123) which are connected to the substrate (1).
The yaw-rate sensor as recited in one of the foregoing claims, wherein the Coriolis elements (100, 200) are interconnected by coupling springs (52).
Dependencies are inferred from the claim text.