Method for manufacturing piezo-electric vibrator

Abstract

A piezo-electric vibrator having an electrode structure enabling to avoid unevenness of junction is to be provided. Plural electrode patterns 160 consisting of a pair of exciting electrode films 80 and 81 formed on a crystal vibrator 110 and frame electrodes 38 and 39 formed on each frame-shaped portion 100 and connected to a pair of exciting electrode films 80 and 81 are formed, and course adjusting of frequency is carried out. After that, plural electrode patterns consisting of a pair of exciting electrodes 80 and 81 formed on each crystal vibrator piece 110 and joining films 40 and 41 formed on each frame-shaped portion 100 and connected to the pair of exciting electrode films 80 and 81 in which each of them is shorted is formed on a crystal wafer 130 forming plural vibrators 20 consisting of the crystal vibrator piece 110 and the frame-shaped portion 100 again so as to carry out anode junction by making applying voltage possible.

Dependencies are inferred from the claim text.