Program for controlling laser apparatus and recording medium for recording program for controlling laser apparatus and capable of being read out by computer

A laser-system control program for making a computer function as:

• means for a person to input information on CAD masks for forming a silicon island, a contact, and a wiring metal over a substrate;
• means for automatically extracting positional information for forming the silicon island over the substrate, formal information on the silicon island, and directional information on the source, channel, and drain of the silicon island in accordance with the input information on CAD masks for the silicon island, contact, and wiring metal and storing the information in a database;
• means for obtaining an optimum driving condition of a laser system in accordance with the positional information on the silicon island, formal information on the silicon island, and directional information on the source, channel, and drain of the silicon island stored in the database;
• and
• means for controlling the laser system in accordance with the optimum condition of the laser system.

A laser-system control program for making a computer function as:

• means for a person to input the information on CAD masks for forming a silicon island, a contact, and a wiring metal over a substrate;
• means for automatically extracting positional information for forming the silicon island over the substrate, formal information on the silicon island, and directional information on the source, channel, and drain of the silicon island in accordance with the input information on CAD masks for the silicon island, contact, and wiring metal and storing the information in a database;
• means for obtaining an optimum driving condition of a laser system for minimizing laser treatment time required for the one substrate by considering the speed of each drive of a laser system and the time required for changing drives of the laser system in accordance with the positional information on the silicon island, formal information on the silicon island, and directional information on the source, channel, and drain of the silicon island stored in the database;
• and
• means for controlling the laser system in accordance with the optimum condition of the laser system.

A laser-system control program for making a computer function as:

• means for a person to input the information on CAD masks for forming a silicon island, a contact, and a wiring metal over a substrate;
• means for automatically extracting positional information for forming the silicon island over the substrate, formal information on the silicon island, and directional information on the source, channel, and drain of the silicon island in accordance with the input information on CAD masks for the silicon island, contact, and wiring metal and storing the information in a database;
• means for obtaining an optimum driving condition of a laser system for minimizing laser treatment time required for the one substrate by considering speed of each drive of a laser system, time required for changing drives of the laser system, and time required for the computer to generate a driving command for each drive and thereafter for each drive to start actual driving in accordance with the positional information on the silicon island, formal information on the silicon island, and directional information on the source, channel, and drain of the silicon island stored in the database;
• and
• means for controlling the laser system in accordance with the optimum condition of the laser system.

A laser-system control program for making a computer function as:

• means for a person to input information on CAD masks for forming a silicon island, a contact, and a wiring metal over a substrate;
• means for automatically extracting the positional information for forming the silicon island over the substrate, formal information on the silicon island, and directional information on the source, channel, and drain of the silicon island in accordance with the input information on CAD masks for the silicon island, a contact, and wiring metal and storing the information in a database;
• means for specifying a region and a direction for a laser beam to scan the surface of a semiconductor film formed on the substrate so as to include at least a region on which the silicon island will be formed in accordance with the positional information on the silicon island, formal information on the silicon island, and directional information on the source, channel, and drain of the silicon island stored in the database;
• means for minimizing laser processing time required for the one substrate and obtaining an optimum driving condition of a laser system by considering speed of each drive of a laser system, time required for changing drives of the laser system, and time required for the computer to generate a driving command for each drive and thereafter for each drive to start actual driving;
• and
• means for controlling the laser system in accordance with the optimum condition of the laser system.