Etching Liquid for thermoplastic polyimide resin
OwnerMasanori Akita, Toshio Urashima +4inventors
InventorsMasanori Akita, Toshio Urashima, Minoru Oyama, Atsushi Suzuki, Yuko Hashino, Miharu Kaneko
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Abstract
The invention concerns an etching liquid appropriate for etching thermoplastic polyimide resins. The etching liquid it is composed of an aliphatic amino-alcohol whose number of carbon is equal or inferior to 4 having an amino group or an imino group and a hydroxyl group in a molecular thereof, and a tetra alkyl ammonium hydroxide aqueous solution.
Claims4
(Amended) A method for removing thermoplastic polyimide resin residue generated when a non-thermoplastic polyimide resin film adhered to a metal foil by a thermoplastic polyimide resin base adhesive is etched by a non-hydrazine based etchant, wherein an etching liquid comprising an aliphatic amino alcohol whose number of carbon is not more than 4 having one of an amino group and an imino group as well as a hydroxyl group in a molecular thereof and an aqueous solution of tetra alkyl ammonium hydroxide is used when removing said resin residue.
Dependencies are inferred from the claim text.