Polishing cloth

Abstract

A polishing cloth is adhered to a polishing belt including a window opening for end-point detection. A transparent film, including a liner, that transmits end-point detection light is adhered to a portion of the polishing cloth corresponding to the window opening of the polishing belt. Another liner is adhered via an adhesion layer to the adhesion surface of the polishing cloth at area other than the portion corresponding to the window opening. The polishing cloth includes the transparent film that transmits the end-point detection light at the portion corresponding to the window opening of the polishing belt so that an end point of the surface of the object to be polished can be detected through the transparent film. This prevents slurry to leak inside the belt compared to the conventional technology.

Dependencies are inferred from the claim text.