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OwnerTadahiro Ohmi, Takahisa Nitta +3inventors
InventorsTadahiro Ohmi, Takahisa Nitta, Yasuyuki Shirai, Taiji Hashimoto, Kazuhide Ino
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The present invention has an object thereof to make possible the recycling of exhaust gas components in a manufacturing process by cooling, liquefaction, and recovery, and to use toxic or useful gases without disposal, and to dramatically reduce the frequency of exhaust system maintenance by combining such a recovery method with a vacuum exhaust system. In the gas recovering apparatus, followings are disposed downstream from the chamber in an exhaust line; adsorption columns for adsorbing one or more exhaust gas components within a exhaust gas from a chamber, or reaction tubes for directly degrading such components, a means for introducing gas which is able to react to said exhaust gas components upstream from said adsorption tubes or reaction tubes, and cooling tubes for liquefying and recovering exhaust gases from said adsorption tubes or reaction tubes. Furthermore, the present invention also relates to a vacuum exhausting method in which, in the vacuum apparatus, some type of gas is continuously caused to flow within the chamber, and relates to a vacuum exhausting apparatus, in which a mechanism is provided for introducing gas between the vacuum exhausting pump and the chamber.
A gas recovering apparatus comprising followings disposed downstream from the chamber in an exhaust line,
A vacuum exhausting method, comprising a means for introducing a gas, a vacuum exhausting apparatus for exhausting gases, and a chamber for maintaining a vacuum, wherein some type of gas is continuously caused to flow within the chamber.
A vacuum exhausting method, wherein, within said chamber, a flow of N2 or Ar gas is continuously conducted, other than at times when process gases are caused to flow.
A vacuum exhausting apparatus, wherein a means is provided for introducing a gas between a vacuum exhausting pump and a chamber.
A vacuum exhausting method, wherein some type of gas is continuously caused to flow from a gas introduction part provided between a vacuum exhausting pump and a chamber.
A vacuum exhausting method, wherein N2 or Ar gas is continuously caused to flow from a gas introduction part provided between a vacuum exhausting pump and a chamber.
A vacuum exhausting method, wherein, during the flow of a special material gas within a chamber, N2, Ar, or H2 gas is continuously caused to flow from a gas introduction part provided between a vacuum exhausting pump and a chamber.
A vacuum exhausting method, wherein, during the time in which a chamber is reduced in pressure from atmospheric pressure, some type of gas is continuously caused to flow within the chamber.
A vacuum exhausting apparatus, comprising a vacuum exhausting pump which is a turbomolecular pump, and some type of back pump, wherein a means is provided for introducing gas between the turbomolecular pump and the back pump.
A vacuum exhausting method, wherein some type of gas is continuously caused to flow from a gas introduction part provided between a turbomolecular pump and a back pump.
A vacuum exhausting method, wherein, during the flow of a special material gas within a chamber, N2, Ar, or H2 gas is continuously caused to flow from a gas introduction part between a turbomolecular pump and a back pump.
A vacuum exhausting method, wherein, during the time in which a chamber is reduced in pressure from atmospheric pressure, N2 or Ar gas is continuously caused to flow from a gas introduction part between a turbomolecular pump and a back pump.
Dependencies are inferred from the claim text.