Dielectric waveguide and a method of manufacturing a dielectric waveguide
AssigneeMurata Manufacturing Co., Ltd.
InventorToshikazu Takeda
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Abstract
The present invention provides a method of efficiently manufacturing a dielectric waveguide with high reliability and precision. In the method, a resist material is formed on the outer surface of a green compact provided with a removal inhibiting layer, and predetermined portion of the green compact defined by the resist material is removed by the sand blasting method using the resist material as a mask, until the removal inhibiting layer is exposed to obtain a shaped green compact structure. The thus-obtained structure is fired to obtain a sintered body which comprises a dielectric strip and a wing.
Claims10
A method of manufacturing a dielectric waveguide a plurality of conductors having substantially parallel planes, a dielectric strip arranged between the planes of the plurality of conductors, and a wing integrally formed with the dielectric strip to extend from the dielectric strip along each of the planes of the conductors, the method comprising the steps of:
- preparing a sintered ceramic substrate for forming a portion of the dielectric strip and the wing;
- preparing a green sheet containing an inorganic powder and an organic binder for forming the remainder of the dielectric strip;
- fixing the green sheet on the ceramic substrate, for preparing a composite laminate;
- wherein the step of preparing the composite laminate includes the step of providing a removal inhibiting layer comprising a difficult-to-remove material having a lower removal rate than that of the remainder of the green sheet between the ceramic substrate and the green sheet in the composite laminate;
- forming a resist material on the outer surface of the composite laminate, a position of the resist material defining an opening corresponding to the wing;
- removing the portion of the green sheet, which is exposed through the opening, to a desired amount until the removal inhibiting layer is exposed, by using the resist material as a mask to form an unfired structure having a shape comprising the dielectric strip and the wing;
- removing the resist material;
- firing the structure to obtain a sintered body having the dielectric strip and the wing;
- providing the conductors respectively on the surfaces of the dielectric strip and the wing, which face outward;
- and
- arranging two sintered bodies in a state in which the dielectric strips are opposed to each other.
Dependencies are inferred from the claim text.