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US 2003/0152125 A1Published application
Surface emitting laser and semiconductor light emitting device
OwnerJunichi Kinoshitainventor
Life of this patent
Estimating the term…
Abstract
A surface emitting laser alleviated in reflection from facets of its active layer and waveguide layer and remarkably improved in oscillation property is configured not to make vertical side surfaces relative to the active layer or the waveguide direction. In VCSEL, side surfaces of the active layer are processed not to made vertical surfaces. In GCSEL, its crystalline surface orientation and its waveguide structure are chosen appropriately not to make upright surfaces on facets of the waveguide.
Claims20
A surface emitting laser comprising:
- a semiconductor substrate;
- and
- an active layer made on a first major surface of said semiconductor substrate, so that light output from said active layer be obtained in a direction substantially normal to said major surface of said substrate,
- said active layer having side surfaces which are offset from vertical planes normal to said major surface of said semiconductor substrate to prevent in-plane horizontal resonance of light in said active layer.
1 more element
A surface emitting laser comprising:
- a semiconductor substrate;
- an active layer provided on a first major surface of said semiconductor substrate;
- and
- a waveguide layer provided on said first major surface of said semiconductor substrate and having formed 2nd-order gratings along the waveguide direction, so as to obtain output light in a direction substantially normal to said first major surface of said semiconductor substrate,
- said laser having a substantially rectangular element configuration when viewed from a direction normal to said first major surface of said semiconductor substrate,
- any of side surfaces of said substantially rectangular element being cleaved surfaces;
- said cleaved surfaces being offset from vertical planes normal to said first major surface,
- said waveguide direction being not parallel with any of sides of the substantial rectangle.
5 more elements
A semiconductor light emitting device comprising:
- a supporting member;
- a surface emitting laser mounted on said supporting member;
- and
- a packaging member enveloping said surface emitting laser,
- said surface emitting laser including:
- a semiconductor substrate;
- and
- an active layer made on a first major surface of said semiconductor substrate, so that light output from said active layer be obtained in a direction substantially normal to said major surface of said substrate,
- said active layer having side surfaces which are offset from vertical planes relative to said major surface of said semiconductor substrate to prevent in-plane resonance of light in said active layer.
6 more elements
Dependencies are inferred from the claim text.