Laser optical apparatus
AssigneeSemiconductor Energy Laboratory Co., Ltd., a Japan corporation
InventorKoichiro Tanaka
Life of this patent
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Abstract
There is provided a structure for reducing optical loss in an optical apparatus (homogenizer) for making the intensity distribution of a laser beam uniform. In a multi-cylindrical lens (a glass substrate having a multiplicity of cylindrical lenses formed thereon) used in a homogenizer, convex cylindrical lenses and concave cylindrical lenses are arranged alternately, and the boundaries between the cylindrical lenses have a smooth structure. This makes it possible to reduce scattering of beams that has occurred at the boundaries between the cylindrical lenses.
Claims32
A laser system comprising:
- a pulse laser;
- a multi-cylindrical lens;
- and
- a convex cylindrical lens,
- wherein the multi-cylindrical lens comprises a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately and continuously.
A laser system comprising:
- a pulse laser;
- first and second multi-cylindrical lenses;
- and
- first and second convex cylindrical lenses,
- wherein each of the first and second multi-cylindrical lenses comprises a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately and continuously.
A laser system comprising:
- a continuous laser;
- a multi-cylindrical lens;
- and
- a convex cylindrical lens,
- wherein the multi-cylindrical lens comprises a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately and continuously.
A laser system comprising:
- a continuous laser;
- first and second multi-cylindrical lenses;
- and
- first and second convex cylindrical lenses,
- wherein each of the first and second multi-cylindrical lenses comprises a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately and continuously.
A lens comprising a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately and continuously.
A lens comprising a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately and continuously,
- wherein a radius of curvature of the convex cylindrical lenses is the same as a radius of curvature of the concave cylindrical lenses.
Dependencies are inferred from the claim text.