Conductor routing for a printhead
AssigneeHewlett-Packard Developmental Company, L.P.
InventorsMatthew Giere, Lawrence H. White, Timothy L. Weber
Life of this patent
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Abstract
A printhead including a printhead substrate having at least one opening for providing a fluid path through the substrate and a thin film membrane formed on a second surface of the substrate. The thin film membrane includes a plurality of fluid feed holes, each fluid feed hole is located over the opening in the substrate. The thin film membrane, which extends over the opening, also has a plurality of fluid ejection elements and a plurality of conductive leads to the fluid ejection elements. All portions of the fluid ejection elements and conductive leads overlie the substrate.
Claims13
A printhead comprising:
- a printhead substrate having at least one opening formed therein, the at least one opening providing a fluid path through the substrate;
- and
- a thin film membrane formed on a second surface of the substrate and extending over the at least one opening in the substrate, the thin film membrane having a plurality of fluid feed holes formed therein, the fluid feed holes being located over the at least one opening in the substrate, the thin film membrane including a plurality of fluid ejection elements and a plurality of conductive leads to the fluid ejection elements,
- wherein all portions of the fluid ejection elements and conductive leads overlie the substrate.
A method of fabricating a fluid ejector comprising:
- depositing a plurality of thin film layers on a first surface of a printhead substrate, the plurality of thin film layers forming a thin film membrane, at least one of the layers forming a plurality of fluid ejection elements, at least another of the layers forming a plurality of conductive leads to the fluid ejection elements;
- forming a plurality of fluid feed holes in the thin film membrane;
- forming at least one opening in a second surface of the substrate, the at least one opening providing a fluid path from a second surface of the substrate through the substrate,
- wherein the plurality of fluid feed holes are located over the at least one opening in the substrate, and wherein all portions of the fluid ejection elements and conductive leads overlie the substrate.
A fluid ejector comprising:
- a substrate having at least one opening formed therein, the at least one opening providing a fluid path through the substrate;
- and
- a thin film membrane formed on a second surface of the substrate and extending over the at least one opening in the substrate, the thin film membrane having a plurality of fluid feed holes formed therein, the fluid feed holes being located over the at least one opening in the substrate, the thin film membrane including a plurality of fluid ejection elements and a plurality of conductive leads to the fluid ejection elements,
- wherein all portions of the fluid ejection elements and conductive leads overlie the substrate.
Dependencies are inferred from the claim text.