Pressure sensor module
AssigneeRobert Bosch GmbH
InventorsHeiko Scheurich, Martin Mast, Berthold Rogge, Masoud Habibi
Life of this patent
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Abstract
In a pressure sensor module according to the prior art, which is intended for detecting the pressure of a corrosive medium, the conventional sensor cell with a pressure sensor chip is modified in order to protect it from corrosion, which results in a large volume for a pressure-transmitting fluid. This is disadvantageous for the calibration and for a high degree of measurement precision. In a pressure sensor module (1) according to the invention, a conventional sensor cell (5) is used that has an adapter (21) connected to it, which has a very small volume for a pressure-transmitting medium.
Claims14
A pressure sensor module, comprised at least of a pressure sensor chip for detecting a pressure, which is connected to a pressure fitting that conducts the pressure to the pressure sensor chip, characterized in that the pressure fitting (19) has an adapter (21) connected to it, which receives the pressure and transmits it to the pressure sensor chip (7) by means of the pressure fitting (19), and which protects the pressure sensor chip (7) from mediums that could damage the pressure sensor chip (7).
Dependencies are inferred from the claim text.