Enhanced Photo-EMF sensor with high bandwidth and large field of view

A photo-EMF sensor comprising:

• a substrate;
• and
• at least one sensing region in said substrate, said at least one sensing region including (i) a pair of electrodes disposed in, on or above said substrate and (ii) an active region in said substrate disposed adjacent said pair of electrodes, the pair of electrodes of said at least one sensing region being spaced from one another by a distance which is less than the diffusion length of said active region.

A method of making a photo-EMF sensor comprising:

• (a) providing a substrate having major surface thereof;
• (b) causing lattice damage in regions of said substrate defining at least a portion of one or more sensing regions thereof, and
• (c) causing lattice damage in regions of said substrate defining at least a portion of one or more isolating regions thereof, the amount of lattice damage occurring in said one or more isolating regions being significantly greater than the amount of lattice damage occurring in said one or more sensing regions.