Equipment coating
AssigneeNxEdge, Inc.
InventorDavid Mark Lynn
Life of this patent
Estimating the term…
Abstract
This invention comprises a coating for equipment parts, particularly including chemical mechanical polishing equipment parts and other equipment that may experience wear or contaminant build-up. The coating includes a fluoropolymer based material that may also contain a colorant or pigment to visually contrast with particles or slurry that is deposited on the parts during use. In some embodiments, multiple layers are applied in contrasting colors so that when a layer closer to the surface begins to wear a lower layer will be readily visible, signaling that re-coating or replacement will soon be required.
Claims27
A coated equipment part, comprising:
- an equipment part;
- and,
- a non-stick coating applied to at least a portion of a surface of the part.
A method of coating a part, comprising:
- roughing a portion of a surface of the part that is to be coated;
- applying a primer coating to the part;
- heating the primer coating and part;
- applying at least one intermediate coating to the primer coating;
- and,
- heating the part.
A coating applied to a chemical mechanical polishing equipment component, the coating comprising a fluoropolymer based material.
Dependencies are inferred from the claim text.