Microchemical component and balancing method

Abstract

The invention creates a micromechanical component, in particular a pressure sensor, comprising: a substrate (2) that has a membrane region (10) and a surrounding region of the membrane region (10); at least one measuring resistance (4a, 4b; 41, 42) provided in the membrane region (10) and modifiable by deformation of the membrane region (10); a corresponding evaluation circuit (50) provided in the surrounding region, an interference effect on the measuring resistance (4a, 4b; 41, 42) being producible by way of a deformation of parts, in particular conductor paths, of the evaluation circuit (50) relative to the substrate (2); and at least one patch (60; 70, 70′) provided in the surrounding region and/or in the membrane region (10) and made of a material such that by way of a deformation of the patch or patches (60) relative to the substrate (2), an analog interference effect can be generated in such a way that the interference effect acting on the measuring resistance (4a, 4b; 41, 42) can be compensated for. The invention also creates a corresponding equalization method on a test chip or as an individual final equalization.

Dependencies are inferred from the claim text.