Continuous cryopump with a device to chip and remove ice from the cryopump chamber

A cryopump adapted for regeneration during cryopumping operation for pumping a process gas comprising:

• a chamber or pump chamber in fluid communication with the process gas to be pumped containing a pumping surface against which said process gas is to condense and freeze, said pumping surface provided with refrigeration means for lowering its temperature to a temperature substantially below the solid-vapor equilibrium temperature of said process gas at the desired operating pressure of said chamber so that said process gas freezes onto and is bonded to said pumping surface,
• a chipper to remove said ice from said pumping surface, said chipper forming a multitude of particles or chips of said ice which are substantially free from said pumping surface, said chipper removing said ice from said pumping surface without substantially changing the temperature of said pumping surface thereby allowing said cryopump to remain in continuous pumping operation,
• a collection chamber positioned below said pumping surface, said collection chamber inter-connected to an opening in the pump chamber with a flow transfer valve, said collection chamber further provided with means for exhausting said ice chips, said flow transfer valve isolating the internal pressures of said pump chamber and said collection chamber from one another to facilitate the removal of said ice chips from said collection chamber without affecting the pressure in said pump chamber, thereby allowing said cryopump to remain in continuous pumping operation,
• a collection conduit between said pumping surface and said flow transfer valve for collecting and routing the freed ice chips, under the influence of gravity, into and through said flow transfer valve into said collection chamber.