Component mounting tool, and method and apparatus for mounting component using this tool

A component mounting method comprising the steps of:

• picking up a component by suction with a working face of a suction nozzle made of stainless steel, said working face being provided with a hardened layer and having a predetermined surface roughness;
• positioning said component such that its metal interconnect faces a metal interconnect of an object on which components is to be mounted;
• and
• pressing said component onto said object while applying ultrasonic vibration from an ultrasonic vibration source to between a support point around which the suction nozzle is rockably supported and the working face of the suction nozzle, thereby ultrasonic-bonding the metal interconnects of the component and object with friction generated therebetween.

A component mounting method comprising the steps of:

• picking up a component by suction with a suction nozzle having a suction head including a working face made of cemented carbide and other parts made of stainless steel, said working face having a predetermined surface roughness;
• positioning said component such that its metal interconnect faces a metal interconnect of an object on which components is to be mounted;
• and
• pressing said component onto said object while applying ultrasonic vibration from an ultrasonic vibration source to between a support point around which the suction nozzle is rockably supported and the working face of the suction nozzle, thereby ultrasonic-bonding the metal interconnects of the component and object with friction generated therebetween.

A component mounting method comprising the steps of:

• picking up a component by suction with a working face of a suction nozzle having a predetermined surface roughness;
• positioning said component such that its metal interconnect faces a metal interconnect of an object on which components is to be mounted;
• pressing said component onto said object while applying ultrasonic vibration from an ultrasonic vibration source to between a support point around which the suction nozzle is rockably supported and the working face of the suction nozzle, thereby ultrasonic-bonding the metal interconnects of the component and object with friction generated therebetween;
• and
• applying ultrasonic vibration to the suction nozzle with its working face in contact with an abrasive at appropriate time for generating friction between the working face and abrasive, thereby refining the working face to a predetermined surface roughness.

A component mounting method comprising the steps of:

• picking up a component by suction with a working face of a suction nozzle having a predetermined surface roughness;
• positioning said component such that its metal interconnect faces a metal interconnect of an object on which components is to be mounted;
• pressing said component onto said object while applying ultrasonic vibration from an ultrasonic vibration source to between a support point around which the suction nozzle is rockably supported and the working face of the suction nozzle, thereby ultrasonic-bonding the metal interconnects of the component and object with friction generated therebetween;
• and
• applying ultrasonic vibration to the suction nozzle with its working face immersed in cleaning liquid at appropriate time for cleaning the working face, thereby refining the working face to a predetermined surface roughness.

A component mounting apparatus comprising:

• a component feeding section for feeding components to a predetermined location;
• an object handling device for handling and positioning an object to which a component is mounted at a predetermined location for component mounting and for transferring the object to other place;
• a component handling device for picking up a component with a working face of a suction nozzle, bringing the component to a position where a metal interconnect of the component and a metal interconnect of the object face each other, and pressing the component onto the object while ultrasonic vibration is applied to the suction nozzle thereby ultrasonic-bonding the component onto the object;
• an ultrasonic vibration device for applying ultrasonic vibration to between a support point of the suction nozzle around which the suction nozzle is rockably supported and the working face of the suction nozzle;
• a polishing device for refining the working face of the suction nozzle to have a predetermined surface roughness by frictional contact between the working face and an abrasive;
• and
• a controller which performs controlling of the above sections and devices such that while the components are being mounted onto the object by ultrasonic bonding, the polishing device and ultrasonic vibration device are activated at appropriate time for bringing the working face of the suction nozzle into contact with the abrasive and for applying ultrasonic vibration to the suction nozzle so as to rub and refine the working face with the abrasive.