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US 2003/0149947 A1Published application
Method and system for detecting defects
AssigneeApplied Materials, Inc.
InventorNimrod Sarig
Life of this patent
Estimating the term…
Abstract
Method for detecting defects, the method comprising the procedures of identifying theoretically-symmetrical windows in an object-image; analyzing the theoretically-symmetrical windows according to expected symmetry of the theoretically-symmetrical windows; and determining the presence of defects according to a deviation from the expected symmetry.
Claims36
Method for detecting defects, the method comprising the procedures of:
- identifying theoretically-symmetrical windows in an object-image;
- analyzing said theoretically-symmetrical windows according to expected symmetry of said theoretically-symmetrical windows;
- and
- determining the presence of defects according to a deviation from said expected symmetry.
1 more element
System for detecting defects in an object-image, the system comprising:
- a storage unit, at least storing at least a portion of said object-image;
- and
- a processor coupled with said storage unit, a database and a human interface,
- wherein said processor identifies theoretically-symmetrical windows in said at least a portion of said object-image, according to an analysis of at least a portion of a database-image retrieved from said database;
- and
- wherein said processor detects defects in said theoretically-symmetrical windows according to a deviation from expected symmetry properties of said theoretically-symmetrical windows.
3 more elements
Dependencies are inferred from the claim text.