Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis system

A failure diagnosis system, comprising:

• a manufacturing apparatus to be diagnosed for failure;
• a sensor for measuring time series data of characteristics of the manufacturing apparatus, the time series data being output in real time;
• a real time controller for operating and controlling the manufacturing apparatus in real time;
• a real time diagnosis module for receiving output of the sensor in real time, calculating the output and producing failure diagnosis data in real time, and determining failure of the manufacturing apparatus in real time;
• a system information storage unit in which data of characteristics measured for a reference apparatus performing same processes as the manufacturing apparatus is recorded as a system information database;
• and
• a process control information storage unit for recording a database of process control information including a recipe for operating and controlling the manufacturing apparatus and outputs instructions to the real time controller.