Method and apparatus for determining characteristics of a laser beam spot
AssigneeVISX, Incorporated, A Delaware Corporation
InventorsKingman Yee, Terrance N. Clapham
Life of this patent
Estimating the term…
Abstract
A method of determining the dimensions of a laser beam spot, comprising: scanning the laser beam in a path across a reference-edge having a photodetector positioned therebehind; and measuring an output signal from the photodetector during the scanning, the output signal corresponding to an area of the laser beam spot incident on the photodetector during the scanning. A method of aligning a laser beam delivery system, the method comprising: positioning a measurement/alignment tool at a target location; firing the laser beam on the tool; observing the laser beam using the tool; and adjusting the system in response to the sensed laser beam.
Claims20
A method of calibrating a scanning laser beam delivery system, the method comprising:
- positioning a calibration tool at a target location;
- directing a laser beam onto the tool with the scanning beam delivery system;
- sensing the laser beam using the tool;
- and
- adjusting the scanning beam delivery system in response to the sensed laser beam.
An apparatus for calibrating a laser beam delivery system, comprising:
- a target which is adapted to fluoresce when the laser beam is incident thereon;
- a laser beam targeting system for directing the laser beam towards the target;
- targeting optics for viewing the position of the target when the target fluoresces in response to the laser beam incident thereon, the targeting optics defining a target position;
- and
- an adjustment mechanism for aligning the laser beam targeting system with the target position.
Dependencies are inferred from the claim text.