Imaging apparatus and method
AssigneeTeraView Limited
InventorsDonald Dominic Arnone, Bryan Edward Cole, Craig Michael Ciesla
Life of this patent
Estimating the term…
Abstract
A range of technique for investigating a sample such as obtaining images and/or spectral information are described. The techniques include a method for deriving structural information about a sample as a continuous function of the depth below the surface of the sample, a method for evaluating a part of the structure of a sample located between two interfaces within the sample, and a contrast enhancing method and apparatus which has a quick image acquisition time.
Claims21
A method of investigating a sample, the method comprising the steps of:
- irradiating a surface of a sample with a pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;
- detecting said radiation reflected from the sample and deriving structural information about the sample as a function of depth from the surface of the sample.
A method according to any preceding claim, the method further comprising the step of detecting a reference signal.
An apparatus for investigating a sample, the apparatus comprising:
- means for irradiating a surface of a sample with pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;
- means for detecting said radiation reflected from the sample and deriving structural information about the sample as a function of depth from the surface of the sample, means
A method of imaging a sample, the method comprising the steps of:
- irradiating a sample with a pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;
- detecting the amplitude of the radiation reflected from or transmitted by the sample;
- and
- generating an image of sample using the amplitude of the radiation detected at a single point in time.
An apparatus for generating an image of a sample, the apparatus comprising:
- means for irradiating a sample with a pulse of electromagnetic radiation, said pulse having a plurality of frequencies in the range from 25 GHz to 100 THz;
- means for detecting the amplitude of the radiation reflected from or transmitted by the sample;
- and
- means for generating an image of sample using the amplitude of the radiation detected at a single point in time.
A method of detecting variation in the composition of a sample, the variations being located between a first and second interfaces of the sample, the method comprising the steps of:
- irradiating a first part and a second part of a surface of the sample with electromagnetic radiation, the first interface being located closer to the surface than the second interface;
- detecting the signal due to reflection of the radiation from the first and second interfaces of the two parts of the sample;
- comparing the peak height of the signal from the second interface with that of the first interface in the same part of the sample to produce a corrected second interface signal and comparing the corrected second interface signals.
A method according to any of claims 14 to 17, further comprising the step of deriving the connected second interface signal for a plurality of parts.
An apparatus for detecting variation in the composition of a sample, the variations being located between a first and second interfaces of the sample, the apparatus comprising:
- means for irradiating a first part and a second part of a surface of the sample with electromagnetic radiation, the first interface being located closer to the surface than the second interface;
- means for detecting the signal due to reflection of the radiation from the first and second interfaces of the two parts of the sample;
- means for comparing the peak height of the signal from the second interface with that of the first interface in the same part of the sample to produce a corrected second interface signal and comparing the corrected second interface signals for the different parts of the sample.
A method as substantially hereinbefore described with reference to the accompanying drawings.
An apparatus as substantially hereinbefore described with reference to any of the accompanying figures.
Dependencies are inferred from the claim text.