Low surface tension, low viscosity, aqueous, acidic compositions containing fluoride and organic, polar solvents for removal of photoresist and organic and inorganic etch residues at room temperature
AssigneeAir Products and Chemicals, Inc.
InventorsDARRYL W. PETERS, IRL E. WARD
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Abstract
The present invention relates to compositions useful in removing photoresist and organic and inorganic residues and processes for removal of photoresists and etch residues. The compositions are aqueous, acidic compositions containing fluoride and organic polar solvents. The compositions are free of glycols and have a low surface tension and viscosity. Corrosion inhibitors are optionally present.
Claims17
A low surface tension, low viscosity, aqueous composition, consisting essentially of an admixture of;
- a. an acidic buffer solution,
- b. a polar, organic solvent that is miscible in all proportions in water,
- c. a fluoride, and
- d. water,
- where the aqueous composition has a ph of from about 3 to about 6 and is free of glycols.
The composition as claimed in 3, wherein the acidic buffer is a solution of ammonium acetate and acetic acid.
A low surface tension, low viscosity, composition, consisting essentially of;
- a. an acidic buffer solution containing acetic acid and ammonium acetate,
- b. from 30% by weight to 90% by weight of an organic polar solvent that is miscible in all proportion in water,
- c. from 0.1% by weight to 20% by weight of ammonium fluoride, and
- d. from 0.5% by weight to 40% by weight of water, and
- f. up to 15% by weight of a corrosion inhibitor
- wherein the pH of the composition is between 3 and 6 and the composition is free of glycols.
A low surface tension, low viscosity, aqueous composition, consisting essentially of an admixture of;
- a. ammonium acetate;
- b. dimethylacetamide,
- c. acetic acid,
- d. a 40% aqueous ammonium fluoride solution, and
- e. deionized water,
- where the pH of the admixture is from about 3 to about 6 and the composition is free of glycols.
Dependencies are inferred from the claim text.