Manufacturing method and manufacturing apparatus of image displaying apparatus

A manufacturing method of an image displaying apparatus comprising steps of conveying panel member for composing a panel of an image displaying apparatus consecutively into a plurality of depressurized chambers equipped with temperature control means respectively, subjecting to a plurality of processings said panel member while controlling temperatures and forming a panel by sealing said panel members,

• wherein said plurality of processing chambers comprise:
• a bake processing chamber for a bake processing of said panel members;
• a cool processing chamber for cooling said panel member into which said panel members are conveyed after said bake processing;
• a first getter processing chamber for a getter processing of an interior of said getter processing chamber into which said panel member is conveyed after said cool processing;
• and
• a second getter processing chamber for the getter processing of said panel member into which said panel member is conveyed after said getter processing and which is adjacent to said first getter processing chamber.

A manufacturing method of an image displaying apparatus comprising steps of conveying panel member for composing a panel of an image displaying apparatus consecutively into a plurality of depressurized processing chambers equipped with temperature control means respectively, subjecting to a plurality of processings said panel member while controlling temperature and forming a panel by sealing said panel members,

• wherein said plurality of processing chamber include:
• a bake processing chamber for a bake processing of said panel member;
• a cool processing chamber for cooling said panel member into which said panel member is conveyed after said bake processing;
• a surface clean processing chamber for a surface clean processing of said panel members into which said panel member is conveyed after said cool processing;
• a first getter processing chamber for a getter processing of an interior of said processing chamber into which said panel member is conveyed after said surface clean processing;
• and
• a second getter processing chamber adjacent to said first getter processing chamber for the getter processing of said panel member into which said panel member is conveyed after said getter processing.

A manufacturing method of an image displaying apparatus comprising steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized atmosphere and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a getter processing chamber filled with the depressurized atmosphere and performing a getter processing of the conveyed member or either or both of the conveyed members;
• and
• c:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere, and heating for sealing, wherein a temperature of a member subjected to the getter processing at said step b is lower than a heating temperature at said step a.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized atmosphere, and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a cool processing chamber filled with the depressurized atmosphere for cooling;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a getter processing chamber filled with the depressurized atmosphere for a getter processing of the conveyed member or either or both of the conveyed members;
• and
• d:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized atmosphere and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a surface clean processing chamber filled with the depressurized atmosphere and performing a surface clean processing of the conveyed member or either or both of the conveyed members;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a getter processing chamber filled with the depressurized atmosphere, and performing a getter processing of the conveyed member or either or both of the conveyed members;
• and
• d:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere and heating for sealing.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized chamber and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a surface clean processing chamber filled with the depressurized atmosphere and performing a surface clean processing of the conveyed member or either or both of the conveyed members;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a first getter processing chamber filled with the depressurized atmosphere and performing a getter processing of an interior of said first getter processing chamber;
• d:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a second getter processing chamber filled with the depressurized atmosphere and performing the getter processing of the conveyed member or either or both of the conveyed members;
• and
• e:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere and heating for sealing.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized atmosphere and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a cool processing chamber filled with the depressurized atmosphere and performing a cool processing;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a surface clean processing chamber filled with the depressurized atmosphere, and performing a surface clean processing of the conveyed member or either or both of the conveyed members;
• d:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a getter processing chamber filled with the depressurized atmosphere and performing a getter processing of the conveyed member or either or both of the conveyed members;
• and
• e:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere and heating for sealing.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed, and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a cool processing chamber filled with the depressurized atmosphere, and performing a cool processing;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a surface clean processing chamber filled with the depressurized atmosphere, and performing a surface clean processing of the conveyed member or either or both of the conveyed members;
• d:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a first getter processing chamber filled with the depressurized atmosphere, and performing a getter processing of an interior of said first getter processing chamber;
• e:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a second getter processing chamber filled with the depressurized atmosphere, and performing the getter processing of the conveyed member or either or both of the conveyed members;
• and
• f:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere.

A manufacturing apparatus of an image displaying apparatus, comprising:

• a getter processing chamber for performing a getter processing of either or both of a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed under a vacuum atmosphere;
• a seal processing chamber for performing a seal processing by heating said first member and said second member;
• and
• conveying means which is capable of conveying said first member and said second member from said getter processing chamber into said seal processing chamber,
• wherein a heat shielding member is disposed between said getter processing chamber and said seal processing chamber.

A manufacturing apparatus of an image displaying apparatus, comprising:

• a bake processing chamber for performing a bake processing by heating a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed under a vacuum atmosphere;
• a getter processing chamber for performing a getter processing of either or both of said first member and said second member;
• and
• conveying means which is capable of conveying said first member and said second member from said bake processing chamber into said getter processing chamber,
• wherein a heat shielding member is disposed between said bake processing chamber and said getter processing chamber.

A manufacturing apparatus of an image displaying apparatus, comprising:

• a bake processing chamber for performing a bake processing by heating a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed under a vacuum atmosphere;
• a getter processing chamber for performing a getter processing of either or both of said first member and said second member;
• a seal processing chamber for performing a seal processing by heating said first member and said second member;
• and
• conveying means which is capable of conveying said first member and said second member into the bake processing chamber, the getter processing chamber and the seal processing chamber in this order,
• wherein heat shielding members are disposed among the processing chambers.

A manufacturing apparatus of an image displaying apparatus, comprising:

• a bake processing chamber for performing a bake processing by heating a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed under a depressurized atmosphere;
• a cool processing chamber for slowly cooling either or both of said first member and said second member;
• a getter processing chamber for performing a getter processing of either or both of said first member and said second member;
• and
• conveying means which is capable of conveying said first member and said second member into said bake processing chamber, said cool processing chamber and said getter processing chamber in this order.

A manufacturing apparatus of an image displaying apparatus, comprising:

• a bake processing chamber for performing a bake processing by heating a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed under a depressurized atmosphere;
• a cool processing chamber for slowly cooling either or both of said first member and said second member;
• a getter processing chamber for performing a getter processing of either or both of said first member and said second member;
• a seal processing chamber for performing a seal processing by heating said first member and said second member;
• and
• conveying means which is capable of conveying said first member and said second member into said bake processing chamber, said cool processing chamber, said getter processing chamber and said seal processing chamber in this order.