Self-grown hydrophobic nano molecule organic diffusion barrier and method of the same

Abstract

A structure of a hydrophobic nano organic molecular diffusion barrier on dielectric material and the method for fabricating said hydrophobic nano organic molecular diffusion barrier is disclosed. This invention provides a method for fabricating a hydrophobic nano organic molecular diffusion barrier on dielectric material after plasma dry-etching or chemical mechanical polishing. The hydrophobic nano organic molecular diffusion barrier can spontaneously generate a hydrophobic organic barrier film to prevent from the moisture absorption of the dielectric material, and the thickness of the hydrophobic organic barrier film is equal in nano scale. Moreover, said hydrophobic nano organic molecular diffusion barrier can successfully keep Cu atoms from the dielectric material. Therefore, it is able to be efficient in resolving the problems of moisture absorption and Cu atom diffusion of the dielectric material by the nano molecular organic diffusion barriers according to this invention.

Dependencies are inferred from the claim text.