Manufacturing method for buried insulating layer-type semiconductor silicon carbide substrate and manufacturing apparatus thereof

A manufacturing method for a buried insulating layer-type semiconductor silicon carbide substrate, characterized in comprising:

• the first step of placing an SOI substrate, which has a surface silicon layer of a predetermined thickness and a buried insulator, in a heating furnace and of increasing the temperature of the atmosphere within the heating furnace while supplying a mixed gas of a hydrogen gas and of a hydrocarbon gas into said heating furnace and, thereby, of metamorphoseing the surface silicon layer of said SOI substrate into a single crystal silicon carbide thin film;
• the second step of depositing a carbon thin film on said single crystal silicon carbide thin film by excessively carrying out said first step;
• the third step of replacing said mixed gas with an inert gas wherein an oxygen gas is mixed in a predetermined ratio and of heating said SOI substrate up to 550° C., or higher, so that said carbon thin film is removed through etching;
• the fourth step of replacing said inert gas wherein an oxygen gas is mixed with a pure inert gas into which no oxygen gas is mixed and of increasing the temperature of the atmosphere within said heating furnace up to a predetermined temperature;
• and the fifth step of making a new single crystal silicon carbide thin film grow on the single crystal silicon carbide thin film on the surface of said SOI substrate by supplying a hydrogen gas and a silane-based gas into the heating furnace under the condition wherein said predetermined temperature of the atmosphere is maintained.