Production method for flat panel display
OwnerTakashi Noguchi, Setsuo Usui +1inventors
InventorsTakashi Noguchi, Setsuo Usui, Hideharu Nakajima
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Abstract
A method of manufacturing a flat panel display capable of manufacturing and preparing TFT of a pixel part and TFT of a scanning part with high reliability, comprising the steps of forming an amorphous silicon thin film on a substrate comprising a pixel part and a drive part, removing hydrogen from the amorphous silicon thin film formed in the drive part by irradiating a laser beam while without irradiating the amorphous silicon thin film formed in the pixel part, and crystallizing the amorphous silicon thin film formed in the drive part by irradiating a laser beam further, thereby changing the amorphous silicon thin film into a polycrystalline silicon thin film.
Claims14
A method of manufacturing a flat panel display, comprising the steps of:
- forming an amorphous silicon thin film on a substrate comprising a pixel part and a drive part;
- removing hydrogen from the amorphous silicon thin film formed in the drive part by irradiating a laser beam while without irradiating the amorphous silicon thin film formed in the pixel part;
- and
- crystallizing the amorphous silicon thin film formed in the drive part by irradiating a laser beam further, thereby changing the amorphous silicon thin film into a polycrystalline silicon thin film.
Dependencies are inferred from the claim text.