Positive photosensitive composition

A positive photosensitive composition comprising (A) an acid generator, which generates an acid upon irradiation with actinic ray or radiation, represented by formula (I) shown below, and (B) a resin having a monocyclic or polycyclic alicyclic hydrocarbon structure and being decomposed by the action of an acid to increase dissolution speed in an alkali developer.

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• wherein R1 to R5, which may be the same or different, each represent a hydrogen atom, a nitro group, a halogen atom, or an unsubstituted or substituted alkyl, alkoxy, alkyloxycarbonyl, aryl or acylamino group, or at least two of R1 to R5 may combine with each other to form a cyclic structure;
• R6 and R7, which may be the same or different, each represent a hydrogen atom, a cyano group, or an unsubstituted or substituted alkyl or aryl group;
• Y1 and Y2, which may be the same or different, each represent an unsubstituted alkyl group, an alkyl group having a substituent, an ether linkage group or a sulfide linkage group, or an unsubstituted or substituted alkenyl group, provided that when both Y1 and Y2 are alkyl groups, at least either Y1 or Y2 has a hydroxy group, an ether linkage group or a sulfide linkage group, or each of the alkyl groups contains at least 2 carbon atoms;
• at least one of R1 to R5 and at least either Y1 or Y2 may combine with each other to complete a ring, at least one of R1 to R5 and at least either R6 or R7 may combine with each other to complete a ring, at least two structures represented by formula (I) may be linked together in any of the positions of R1 to R7, Y1 and Y2 via a linkage group;
• and X− represents a non-nucleophilic anion.