Vacuum ultraviolet transmitting direct deposit vitrified silicon oxyfluoride lithography glass photomask blanks

A method of making a below 193 nm VUV transmitting glass photomask substrate blank, said method comprising:

• providing a carbon monoxide combustion burner;
• providing a heat containing direct deposit furnace;
• providing a supply of carbon monoxide and a supply of oxygen to said carbon monoxide combustion burner to form a carbon monoxide combustion reaction flame,
• providing a direct glass deposition surface proximate said flame,
• supplying a Si-glass precursor feedstock and a F-glass precursor feedstock to said carbon monoxide combustion burner wherein said Si-glass precursor feedstock and said F-glass precursor feedstock is reacted in said flame into a silicon oxyfluoride glass soot directed at said glass deposition surface, and said soot is concurrently directly deposited and vitrified into a silicon oxyfluoride glass body,
• forming said directly deposited vitrified silicon oxyfluoride glass body into a photomask blank.

A method of making a below 193 nm VUV transmitting glass for transmitting wavelengths of about 157 nm, said method comprising:

• providing a carbon monoxide combustion burner;
• providing a supply of carbon monoxide and a supply of oxygen to said carbon monoxide combustion burner to form a carbon monoxide combustion reaction flame,
• providing a direct glass deposition surface proximate said flame,
• supplying a Si-glass precursor feedstock and a said F-glass precursor feedstock to said carbon monoxide combustion burner wherein said Si-glass precursor feedstock and said F-glass precursor feedstock is reacted in said flame into a silicon oxyfluoride glass soot directed at said glass deposition surface, and said soot is concurrently directly deposited and vitrified into a silicon oxyfluoride glass body.

A method of making a homogeneous glass optical element, said method comprising:

• providing a carbon monoxide combustion burner;
• providing a supply of carbon monoxide and a supply of oxygen to said carbon monoxide combustion burner to form a carbon monoxide combustion reaction flame,
• providing a direct glass deposition surface proximate said flame,
• supplying a Si-glass precursor feedstock and a dopant R-glass precursor feedstock to said carbon monoxide combustion burner wherein said Si-glass precursor feedstock and said dopant R-glass precursor feedstock is reacted in said flame into a dry R doped silica glass soot directed at said glass deposition surface, and said soot is concurrently directly deposited and vitrified into a dry homogeneous R doped silica glass body,
• forming said directly deposited vitrified glass body into a homogeneous glass optical element.

A method of making a homogeneous glass optical element, said method comprising:

• providing a carbon monoxide combustion burner;
• providing a supply of carbon monoxide and a supply of oxygen to said carbon monoxide combustion burner to form a carbon monoxide combustion reaction flame,
• providing a direct glass deposition surface proximate said flame,
• supplying a Si-glass precursor feedstock to said carbon monoxide combustion burner wherein said Si-glass precursor feedstock is reacted in said flame into a dry silica glass soot directed at said glass deposition surface, and said soot is concurrently directly deposited and vitrified into a dry homogeneous silica glass body,
• forming said directly deposited vitrified glass body into a homogeneous glass optical element.