Tetrahedral amorphous carbon film and method of making same
AssigneeFujitsu Limited
InventorHiroyuki Hyodo
Life of this patent
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Abstract
A method of making a tetrahedral amorphous carbon (ta-C) film comprises depositing carbon atoms over the surface of an object. The surface of the object is kept exposed to fluorine atoms during the deposition of the carbon atoms. The method allows the fluorine atoms to scatter within the deposited carbon atoms in the tetrahedral amorphous carbon film. The hardness of the tetrahedral amorphous carbon film can be improved in response to an increased content of sp3 carbon bonds included within the tetrahedral amorphous carbon film. In addition, the tetrahedral amorphous carbon film still provides a sufficient repellent performance to water due to the fluorine atoms existing near the exposed surface of the tetrahedral amorphous carbon film.
Claims17
A method of making a tetrahedral amorphous carbon film, comprising:
- depositing carbon atoms over a surface of an object, keeping the surface of the object exposed to fluorine atoms.
A tetrahedral amorphous carbon film overlaid on a substrate and including fluorine atoms inside the film.
A head slider comprising:
- a slider body opposing a bottom surface to a recording medium;
- and
- a tetrahedral amorphous carbon film overlaid on the bottom surface, said tetrahedral amorphous carbon film including fluorine atoms inside.
Dependencies are inferred from the claim text.