Process for producing hexachlorodisilane
AssigneeMitsubishi Materials Corporation
InventorsSeiichi Kirii, Mitsutoshi Narukawa, Hisayuki Takesue
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Abstract
A process for producing hexachlorodisilane comprising, condensing an exhaust gas discharged from a reactor for producing polycrystalline silicon from a chlorosilane and hydrogen to separate the hydrogen, distilling the resultant condensate to separate the unreacted chlorosilane and by-product silicon tetrachloride, and then further distilling to recover hexachlorodisilane, wherein tetrachlorodisilane can be recovered together with the hexachlorodisilane, and the hexachlorodisilane and tetrachlorodisilane recovered have a far higher purity than the conventional ones produced from metallic silicon.
Claims16
A process for producing hexachlorodisilane, comprising;
- i) cooling an exhaust gas discharged from a silicon reaction system in the precipitation of polycrystalline silicon by thermal cracking or hydrogen reduction of a chlorosilane at high temperature to make a condensate;
- and
- ii) distilling said condensate to recover hexachlorodisilane.
In a method of producing an amorphous silicon thin film made from hexachlorodisilane, the improvement which comprises using a hexachlorodisilane produced by a process comprising,
- i) cooling an exhaust gas discharged from a silicon reaction system in the precipitation of polycrystalline silicon by thermal cracking or hydrogen reduction of a chlorosilane at high temperature to make a condensate;
- and
- ii) distilling said condensate to recover hexachlorodisilane.
In a method of producing a base glass for optical fibers made from hexachlorodisilane, the improvement which comprises using a hexachlorodisilane produced by a process comprising;
- i) cooling an exhaust gas discharged from a silicon reaction system in the precipitation of polycrystalline silicon by thermal cracking or hydrogen reduction of a chlorosilane at high temperature to make a condensate;
- and
- ii) distilling said condensate to recover hexachlorodisilane.
Dependencies are inferred from the claim text.