Cylinder-type capacitor for a semiconductor device
AssigneeSamsung Electronics Co., Ltd.
InventorHong-Ki Kim
Life of this patent
Estimating the term…
Abstract
A cylinder-type capacitor of a semiconductor device includes a lower electrode that is formed of a conductive layer which directly contacts a conductive region on a semiconductor substrate. The lower electrode comprises a first cylinder in contact with the conductive region and a second cylinder on and in contact with the first cylinder, the second cylinder being larger in width than the first cylinder. A dielectric layer is on the lower electrode. An upper electrode is on the dielectric layer. The upper electrode extends into the first and second cylinders. According to the present invention, a semiconductor cylinder-type capacitor is provided at a relatively low production cost using simplified fabrication processes.
Claims9
A cylinder-type capacitor of a semiconductor device comprising:
- a lower electrode formed of a conductive layer which directly contacts a conductive region on a semiconductor substrate, wherein the lower electrode comprises a first cylinder in contact with the conductive region and a second cylinder on, and in contact with, the first cylinder, the second cylinder being larger in width than the first cylinder;
- a dielectric layer on the lower electrode;
- and
- an upper electrode on the dielectric layer, wherein the upper electrode extends into the first and second cylinders.
Dependencies are inferred from the claim text.