Reflecting mirror supporting mechanism

Abstract

A reflecting mirror supporting mechanism has a reflecting mirror with countersinks in the side thereof, a mirror holder (a base) for supporting the reflecting mirror, and leaf springs which urge a base-side face of each of the countersinks against the mirror holder. The reflecting mirror is movable in an in-plane direction of the reflecting mirror, and the base-side face in each of the countersinks is parallel with the rear of the reflecting mirror. A first pad is disposed in a space between the leaf spring and the base-side face. In a space between the rear of the reflecting mirror and the mirror holder, a second pad is provided which is flat in shape in a contact portion with the rear of the reflecting mirror and is spherical in shape in a contact portion with the mirror holder.

Dependencies are inferred from the claim text.