Reference lens for interferometer and interferometer that uses it
AssigneeFuji Photo Optical Co., Ltd.
InventorHideo Kanda
Life of this patent
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AssigneeFuji Photo Optical Co., Ltd.
InventorHideo Kanda
Estimating the term…
A reference lens for an interferometer is constructed so that light transmitted by a partially reflecting reference spherical surface may be converged, toward a focal point that coincides with the center of curvature of the reference spherical surface, and reflected from a subject spherical surface that also has its center of curvature at the focal point. Measurement of the shape of the subject spherical surface is possible based on the interference of two light beams, one reflected by the subject spherical surface and one reflected by the reference spherical surface. The reference lens, which may include five or six lens components or lens elements, includes a negative meniscus lens component, a positive lens group, and a positive lens component. Specified conditions are satisfied to provide a reference lens that has favorable correction of aberrations, is compact, and can measure the surface accuracy of a wide range of convex spherical surfaces.
A reference lens for an interferometer, the reference lens being constructed so that light that is transmitted by a partially reflecting reference spherical surface of the reference lens may first be converged toward a focal point that coincides with the center of curvature of the partially reflecting reference spherical surface and then reflected from a subject spherical surface that also has its center of curvature at said focal point, so that light reflected from the subject spherical surface is transmitted back through the partially reflecting reference spherical surface and interferes with light that is initially reflected by the partially reflecting reference spherical surface, thereby enabling measurement of the shape of the subject spherical surface, said reference lens comprising, a negative meniscus lens component at a first side of the reference lens, a positive lens group, and a positive meniscus lens component at a second side of the reference lens nearest where the focal point is located;
Dependencies are inferred from the claim text.