Multi-layered film reflector manufacturing method

A method for manufacturing a multi-layered film reflection mirror, in which a multi-layered film which at least two types of substances having different refractive indices respectively are synchronously deposited with a constant periodic length is formed on a substrate, and

• the multi-layered film on the substrate is locally scraped from in order to correct a phase of a reflective wave front in a reflective surface,
• wherein a film or a multi-layered film is formed on a back surface of the substrate in order to produce a deformation of the substrate capable of canceling a deformation of the substrate caused by scraping the multi-layered film.

A method for manufacturing a multi-layered film reflection mirror, in which a multi-layered film which at least two types of substances having different refractive indices respectively are synchronously deposited with a constant periodic length is formed on a substrate, and

• the multi-layered film on the substrate is locally scraped from in order to correct a phase of a reflective wave front in a reflective surface,
• wherein a multi-layered film having an approximately same structure as that of the multi-layered film formed on the surface of the substrate is formed on a back surface of the substrate, and
• the multi-layered film formed on the back surface of the substrate is locally scraped at portions correspondent to the portions where the multi-layered film on the surface of the substrate is locally scraped in order to correct a phase of a reflective wave front with a same thickness as that of the scraped multi-layered film on the surface of the substrate.

A method for manufacturing a multi-layered film reflection mirror, in which a multi-layered film which at least two types of substances having different refractive indices respectively are synchronously deposited with a constant periodic length is formed on a substrate, and

• the multi-layered film on the substrate is locally scraped in order to correct a phase of a reflective wave front in a reflective surface,
• wherein a scraping amount of the multi-layered film is determined based on an influence in a deformation of the substrate caused by scraping the multi-layered film.

A method for manufacturing a multi-layered film reflection mirror, in which a multi-layered film which at least two types of substances having different refractive indices respectively are synchronously deposited with a constant periodic length is formed on a substrate, and

• the multi-layered film on the substrate is locally scraped in order to correct a phase of a reflective wave front in a reflective surface,
• wherein a scraping amount of the multi-layered film is determined so that a phase combining a phase of the reflective wave front, which is modified by a deformation of the substrate caused by scraping the multi-layered film, and a phase of the reflective wave front, which is modified by locally scraping the multi-layered film, becomes equal to a desirable correcting amount.