Autofocus module and method for a microscope-based system
AssigneeLeica Microsystems Semiconductor GmbH
InventorsFranz Cemic, Lambert Danner, Robert Mainberger, Michael Veith, Martin Osterfeld, Uwe Graf
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AssigneeLeica Microsystems Semiconductor GmbH
InventorsFranz Cemic, Lambert Danner, Robert Mainberger, Michael Veith, Martin Osterfeld, Uwe Graf
Estimating the term…
An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.
An autofocus module for a microscope-based system, comprising:
A microscope system comprising:
An method for autofocussing a microscope-based system, the microscope-based system including at least one objective defining an optical axis of the microscope-based system, the method comprising:
Dependencies are inferred from the claim text.