Matching network for RF plasma source
AssigneeThe Regents of the University of California
InventorsDaniel S. Pickard, Ka-Ngo Leung
Life of this patent
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Abstract
A compact matching network couples an RF power supply to an RF antenna in a plasma generator. The simple and compact impedance matching network matches the plasma load to the impedance of a coaxial transmission line and the output impedance of an RF amplifier at radio frequencies. The matching network is formed of a resonantly tuned circuit formed of a variable capacitor and an inductor in a series resonance configuration, and a ferrite core transformer coupled to the resonantly tuned circuit. This matching network is compact enough to fit in existing compact focused ion beam systems.
Claims20
A matching network for coupling an RF power supply to an RF antenna in a plasma generator, comprising:
- a resonantly tunable circuit formed of a variable capacitor and an inductor in a series resonance configuration;
- a ferrite core transformer coupled to the resonantly tunable circuit.
A plasma ion or electron source, comprising:
- an RF power supply;
- a coaxial cable connected to the RF power supply;
- a matching network having an input connected to the coaxial cable, the matching network comprising:
- a resonantly tunable circuit formed of a variable capacitor and an inductor in a series resonance configuration;
- a ferrite core transformer coupled to the resonantly tunable circuit;
- an RF antenna connected to an output of the matching network;
- a plasma ion or electron generator having the RF antenna mounted therein for inductively generating a plasma.
Dependencies are inferred from the claim text.