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US 2003/0146709 A1Published application
Half mirror film producing method and optical element comprising a half mirror film
AssigneeKonica Corporation
InventorsTatsuo Ohta, Satoshi Nakano, Yumi Muramatsu
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Abstract
A method of producing a half mirror film on a substrate having a light transmissive property, comprising steps of: electrically discharging between electrodes facing each other under an atmospheric pressure or an approximate atmospheric pressure so as to make an reactive gas on a plasma state; and exposing a substrate to the reactive gas on the plasma state so as to form a half mirror film on the substrate.
Claims33
A method of producing a half mirror film on a substrate having a light transmissive property, comprising steps of:
- electrically discharging between electrodes facing each other under an atmospheric pressure or an approximate atmospheric pressure so as to make an reactive gas on a plasma state;
- and
- exposing a substrate to the reactive gas on the plasma state so as to form a half mirror film on the substrate.
An optical element, comprising:
- a substrate having a light transmissive property;
- and
- a half mirror film provided on the substrate, the half mirror film having a carbon content of 0.2 to 5 weight %.
Dependencies are inferred from the claim text.