Organic EL device and manufacturing method therefor, electrooptic apparatus, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorMasahiro Uchida
Life of this patent
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Abstract
Manufacturing method comprises steps of forming a functional layer on an electrode which is formed on a base board, forming a facing electrode which faces the electrode so as to sandwich the functional layer by performing vacuum deposition operation. The base board converting step for converting the base board is arranged between the functional layer forming step and the facing electrode forming step. By doing this, it is possible to provide a manufacturing method for an organic EL device and a device therefor in which various member for forming the functional layer can be used and it is easy to optimize the structure of the organic EL device.
Claims19
Manufacturing method for an organic EL device comprising steps of:
- forming a functional layer on an electrode which is formed on a base board;
- forming a facing electrode which faces the electrode so as to sandwich the functional layer by performing vacuum deposition operation;
- wherein base board converting step for converting the base board is arranged between the functional layer forming step and the facing electrode forming step.
A manufacturing device for an organic EL device comprising:
- a functional layer forming device for forming a functional layer on en electrode which is formed on a base board;
- a base board converting device for converting the base board on which the functional layer is formed;
- and
- a facing electrode forming device for forming a facing electrode which faces the electrode so as to sandwich the functional layer by performing vacuum deposition operation.
Manufacturing method for an organic EL device comprising steps of:
- forming a cathode for the organic EL device which is formed on the base board by performing vacuum deposition operation;
- and
- sealing the organic EL device, wherein
- the base board is converted after the cathode forming step before the sealing step.
A manufacturing device for an organic EL device comprising:
- a cathode forming device for forming a cathode for the organic EL device which is formed on the base board by performing vacuum deposition operation;
- a base board converting device form converting the base board;
- and
- a sealing device for sealing the organic EL device.
Dependencies are inferred from the claim text.