Design structures of and simplified methods for forming field emission microtip electron emitters

An electron emission structure comprising:

• a substrate prepared with a patterned topographical feature;
• at least one layer of a first material deposited over the substrate and concurrently etched from the substrate to form an atomically sharp feature on the patterned topographical feature;
• at least one layer of insulating material deposited over the layer of first material;
• a layer of conductive bias material deposited over the layer of insulating material;
• a patterned region wherein deposited layers of material are removed to expose the atomically sharp feature;
• and,
• an electrical connection to elements of the emission structure.

A device incorporating electron emission structures, the device comprising:

• an external electrical connection providing connectivity external to the device;
• an electron emission structure comprising:
• a substrate prepared with a patterned topographical feature;
• at least one layer of a first material deposited over the substrate and concurrently etched from the substrate to form an atomically sharp feature on the patterned topographical feature;
• at least one layer of insulating material deposited over the first material;
• a layer of conductive bias material deposited over the layer of insulating material;
• a patterned region wherein deposited layers of material are removed to expose the atomically sharp feature;
• and,
• an electrical connection to elements of the emission structure;
• and,
• an electrical connection between the electron emission structure and the external electrical connection.