Surface acoustic wave device having improved performance and method of making the device

A surface acoustic wave device including a transducer electrode formed on a substrate, the electrode having a plurality of layers, and at least one of the layers being metal and another of the layers being a metal and oxygen compound.

A method of making a surface acoustic wave device, the method including the steps of:

• providing a substrate;
• and
• creating a transducer electrode having a plurality of layers on the substrate, including creating a metal layer and creating a layer of a material that provides a hardening effect to the metal layer.

A surface acoustic wave device including a transducer electrode electrically connected to a metal component that permits electrical connection of the surface acoustic wave device to an electrical device external to the surface acoustic wave device, the electrode having a metal portion of a first metallization, and the component being of a second, different metallization.

A surface acoustic wave device including a transducer electrode electrically connected to a component that permits electrical connection of the surface acoustic wave device to an electrical device external to the surface acoustic wave device, the electrode having a metal portion made of a first metal, and the component being made of a second, different metal.

A surface acoustic wave device including a transducer electrode electrically connected to a component that permits electrical connection of the surface acoustic wave device to an electrical device external to the surface acoustic wave device, the electrode having a metal portion of a first thickness, and the component being metal of a second, different thickness.

A method of making a surface acoustic wave device, the method including the steps of:

• making a transducer electrode, including making the electrode to have a metal portion of a first metallization;
• and
• making a metal component, electrically connected to the electrode, that permits electrical connection of the surface acoustic wave device to an electrical device external to the surface acoustic wave device, including making the component of a second, different metallization.