Anti-vibration system for use in exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorHiroaki Kato
Life of this patent
Estimating the term…
Abstract
In order to control an internal pressure of an air spring appropriately without being influenced by a change in supply pressure, an anti-vibration system includes an air spring as an actuator for an anti-vibration table, a pressure control valve for controlling the internal pressure of the air spring, a pressure sensor for detecting the air supply pressure to the pressure control valve, a driving system for actuating the pressure control valve in accordance with a detection signal of the pressure sensor, and a variable gain compensation system for performing variable gain compensation to an input signal to the driving system for the pressure control valve, on the basis of the detection signal of the pressure sensor.
Claims7
An anti-vibration system for supporting an article which is to be used in an environment with external vibration and/or which has a vibration source therein, said anti-vibration system comprising:
- a gas spring for supporting the article;
- a pressure control valve for controlling an internal pressure of said gas spring;
- a pressure sensor for detecting a supply pressure to be supplied to said pressure control valve;
- and
- a control system for controlling said pressure control valve in accordance with a detection output signal of said pressure sensor.
An anti-vibration system having a table for carrying thereon an article which is to be used in an environment with external vibration and/or which has a vibration source therein, said anti-vibration system comprising:
- a gas spring for elastically supporting the table for carrying the article thereon;
- a pressure control valve for controlling an internal pressure of said gas spring;
- a pressure sensor for detecting a supply pressure to be supplied to said pressure control valve;
- and
- a control system for controlling said pressure control valve in accordance with a detection output signal of said pressure sensor.
A method of controlling an anti-vibration system for supporting an article which is to be used in an environment with external vibration and/or which has a vibration source therein, said method comprising:
- a supply pressure detecting step for detecting a supply pressure of a gas to be supplied to a gas spring for supporting the article;
- a pressure control valve driving gain correction step for performing gain control to a pressure control valve driving signal on the basis of a detection signal of the supply pressure, and for supplying a signal to a control system for controlling the pressure control valve;
- and
- a pressure control valve driving step for driving the pressure control valve on the basis of a pressure control valve driving signal having gain controlled.
A method of controlling an anti-vibration system for supporting an article which is to be used in an environment with external vibration and/or which has a vibration source therein, said method comprising:
- a supply pressure detecting step for detecting a supply pressure of a gas to be supplied to a gas spring for supporting the article;
- a pressure control valve driving signal correction step for performing offset addition to a pressure control valve driving signal on the basis of a detection signal of the supply pressure, and for supplying a signal to a control system for controlling the pressure control valve;
- and
- a pressure control valve driving step for driving the pressure control valve on the basis of a pressure control valve driving signal having been offset added.
Dependencies are inferred from the claim text.