High temperature superconductor Josephson junction element and manufacturing method for the same
OwnerTetsuro Sato, Jian-Guo Wen +2inventors
InventorsTetsuro Sato, Jian-Guo Wen, Naoki Koshizuka, Shoji Tanaka
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Abstract
In a method of manufacturing a Josephson junction, a first superconductive layer is formed on a substrate. An insulating film is formed on the first superconductive layer. The insulating film is etched to have an inclination portion. The first superconductive layer is etched using the etched insulating film as a mask, to have an inclination portion. A barrier layer is formed on a surface of the inclination portion of the first superconductive layer. A second superconductive layer is formed on the barrier layer and the inclination portion of the insulating layer.
Claims63
A method of manufacturing a Josephson junction comprising:
- forming a first superconductive layer on a substrate;
- forming an insulating film on said first superconductive layer;
- etching said insulating film to have an inclination portion;
- etching said first superconductive layer using said etched insulating film as a mask, to have an inclination portion;
- forming a barrier layer on a surface of said inclination portion of said first superconductive layer;
- and
- forming a second superconductive layer on said barrier layer and said inclination portion of said insulating layer.
A method of manufacturing a Josephson junction comprising:
- forming a first superconductive layer on a substrate;
- forming an insulating film on said first superconductive layer;
- etching said insulating film and said first superconductive layer to have an inclination portion;
- forming a barrier layer on a surface of said inclination portion of said first superconductive layer;
- and
- forming a second superconductive layer on said barrier layer and said inclination portion of said insulating layer.
A method of manufacturing the Josephson junction comprising:
- forming a first super conductive layer on a substrate;
- forming an interlayer insulating layer as a barrier layer on said first superconductive layer;
- forming a second superconductive layer on said barrier layer;
- etching said second superconductive layer and said barrier layer to form 2 or more electrodes;
- forming an insulating layer between said 2 or more electrodes.
A Josephson junction comprising:
- a first superconductive layer formed on substrate and having an inclination portion;
- an insulating film formed on said first superconductive layer and having an inclination portion following to said inclination portion of said first superconductive layer;
- a barrier layer formed on said inclination portion of said first superconductive layer;
- and
- a second superconductive layer formed on said inclination portion of said insulating film and said inclination portion of said barrier layer.
A Josephson junction device comprising:
- a first superconductive layer formed on a substrate;
- 2 or more interlayer insulating films provided on said first superconductive layer to be apart from each other;
- and
- 2 or more second superconductive layers respectively formed on said interlayer insulating layers.
A method of manufacturing a Josephson junction, wherein a material of an insulating layer which is formed on a first superconductive layer is diffused into said first superconductive layer to form a barrier layer on a surface portion of said first superconductive layer, and a second superconductive layer is formed on said barrier layer to form a Josephson junction.
Dependencies are inferred from the claim text.