Optically powered resonant integrated microstructure pressure sensor

A method for sensing pressure using a vacuum cavity device having at least one fluorescent region and a pressure sensitive resonant beam, the method comprising:

• directing a first light wave toward the pressure sensitive resonant beam and the fluorescent region;
• exciting the pressure sensitive resonant beam to a resonant frequency in response to the first light wave;
• and
• transmitting away from the pressure sensitive resonant beam a second light wave generated by the fluorescent region in response to the first light wave, the first and second light waves having different wavelengths, the second light wave having a property corresponding to the resonant frequency of the pressure sensitive resonant beam.

An optically powered integrated microstructure remote pressure sensor comprising:

• a substrate supporting a polysilicon shell having an outer surface and an inner surface, the inner surface defining an evacuated cavity enclosing an area of the substrate, the substrate being provided with a fluorescent region;
• a microbeam affixed to the inner surface of the shell within the evacuated cavity by two spaced apart posts, the microbeam disposed in the vicinity of the substrate;
• a photodiode integrated into the substrate at a surface location beneath the microbeam;
• a first light transporter having a distal end and a proximate end, the proximate end of the first optical fiber being disposed adjacent the outer surface of the shell to direct light from the first optical fiber to the photodiode and to the fluorescent region;
• and
• a second light transporter having a distal end and a proximate end, the proximate end of the second light transporter being disposed at the outer surface of the shell so as to transmit light emitted by the fluorescent region, wherein the transmitted light indicates a frequency of vibration of the beam.

A pressure sensing device comprising:

• a substrate having a photodiode and a fluorescent region;
• a shell having an outer surface and an inner surface;
• a beam affixed to the inner surface of the shell by two posts;
• and
• a light transporter having a distal end and an end proximate the outer surface of the shell in an area adjacent the beam and the fluorescent region.

A pressure sensing device comprising:

• a substrate having a photodiode and a fluorescent region;
• a shell having an outer surface and an inner surface;
• and
• a beam affixed to the inner surface of the shell by two posts.

An optically powered integrated microstructure remote pressure sensor comprising:

• a substrate supporting a polysilicon shell having an outer surface and an inner surface, the inner surface defining an evacuated cavity enclosing an area of the substrate, the substrate being provided with a fluorescent region;
• a microbeam affixed to the inner surface of the shell within the evacuated cavity by two spaced apart posts, the microbeam disposed in the vicinity of the substrate;
• a photodiode integrated into the substrate at a surface location beneath the microbeam;
• and
• a light transporter having a distal end and a proximate end, the proximate end being disposed adjacent the outer surface of the shell to direct light to the photodiode and to the fluorescent region, and to receive a light wave emitted by the fluorescent region, wherein the transmitted light indicates a frequency of vibration of the beam.