Skimmer for mass spectrometry
AssigneeAgilent Technologies, Inc.
InventorAlex Mordehai
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Abstract
The present invention relates to a method and apparatus for a mass spectrometer. The skimmer of the present invention has a surface to reduce the overall interaction and deposition of unwanted compounds. The surface of the skimmer may be formed from an inorganic conductive nitride or may be applied to a substrate as a coating. The invention also includes a method for reducing the interaction or deposition of compounds on a mass spectrometer skimmer by application or coating the skimmer with an inert conductive material.
Claims18
A skimmer for use with a mass spectrometer, said skimmer having a surface comprising an inorganic conductive material selected from the group consisting of nitrides of metals.
A skimmer having a coated surface for reduced interaction with compounds, wherein said coated surface comprises an abrasion-resistant metallic of thickness greater than 0.1 micron.
A system for analyzing a sample having constituents, said system comprising a skimmer having a surface exposed to said constituents, said skimmer comprising an electrically-conducting substrate and a surface layer supported by said substrate, said layer including an inert inorganic material selected from the group consisting of nitrides of metals.
A method of reducing interaction of compounds with a surface of a skimmer, the method comprising applying a coating selected from the group consisting of nitrides of metals to the surface of the skimmer.
Dependencies are inferred from the claim text.